Singulus Technologies AG

TIMARIS Vacuum Sputtering System

VersatileThanks to the broad spectrum of available deposition and conditioning modules the TIMARIS Cluster Tool it the ideal PVD Production Platform for a wide range of applications in the semiconductor industry.

Future-proofIt fulfils all connectivity standards of modern 200 mm and 300 mm foundries and is compatible with GEM300 and SECS/GEM host interfaces and allows advanced process control (APC) necessary for state-of-the art quality control.All modules are capable to handle 200 mm and 300 mm wafers (smaller wafers via adapters).