N&K Technology, Inc.

Gemini-TF Series

DUV-Vis-NIR (Wavelength Range: 190nm – 1000nm) Thin Film Metrology Systems for Patterned and Unpatterned Films on Transparent and Opaque Substrates

The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm

The Gemini-TF Series is our “next-generation” DUV-Vis-NIR Thin Film series for films on transparent and opaque substrates. This series was launched in 2011, superseding the previous generation 3700-RT, 1800-RT, and 1700-RT. Advancements in the optical design of the Gemini-TF Series provide a 50μm spot size for T in comparison to the 200μm spot size for T of previous generations.