RAONTECH Inc

RAONTECH Inc

Suwon-Si, Gyeonggi-Do, KOREA

EFEM (SmartFab™)

EFEM (SmartFab™)

Equipment Front End Module, in short referred to as EFEM has been specifically designed for 200mm and 300mmwafer transfer service. Easy leveling and docking for swift preparation is very much possible in this wafer handling robots and designed for customizable configuration as well.

It has a close loop control of enclosure pressure and field maintenance service is also available.

Product Enquiry

SSL Secure Connection